検索結果をRefWorksへエクスポートします。対象は1件です。
Export
RT Book, Whole SR Print DC OPAC T1 Chemical physics of thin film deposition processes for micro- and nano-technologies / edited by Yves Pauleau T2 NATO science series A1 Pauleau, Y. YR 2002 FD c2002 VO : pbk SP xiii, 363 p. K1 Thin films -- Congresses K1 Nanotechnology -- Congresses PB Kluwer Academic Publishers PP Dordrecht ; Boston SN 1402005245 SN 1402005253 LA English (英語) CL LCC:TA418.9.T45 NO "Published in cooperation with NATO Scientific Affairs Division." NO Includes bibliographical references and index NO 書誌ID=1001380996; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/1001380996 OL 30