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RT Book, Whole SR Print DC OPAC T1 CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications / D. Lange, O. Brand, H. Baltes T2 Microtechnology and MEMS T2 Physics and astronomy online library A1 Lange, D. ( Dirk), 1970- A1 Brand, Oliver, 1964- A1 Baltes, H. (Henry) YR 2002 FD 2002 SP viii, 142 p. K1 Microelectromechanical systems -- Design and construction K1 Metal oxide semiconductors, Complementary -- Design and construction K1 Levers -- Design and construction K1 Atomic force microscopy -- Equipment and supplies -- Design and construction K1 Gas detectors -- Design and construction PB Springer PP New York SN 3540431438 LA English (英語) CL LCC:TK7875 NO Includes bibliographical references (p. 131-140) and index NO 書誌ID=1001388033; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/1001388033 OL 30