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RT Book, Whole SR Print DC OPAC T1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 97 proceedings, September 10-12, 1997, Cambridge, Massachusetts A1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop A1 Institute of Electrical and Electronics Engineers A1 Semiconductor Equipment and Materials International YR 1997 FD c1997 VO : soft. VO : case. SP vi, 460 p. K1 Electronic industries -- Congresses K1 Semiconductors -- Design and construction -- Congresses K1 Computer integrated manufacturing systems -- Congresses PB IEEE Service Center PP Piscataway, NJ SN 0780340507 SN 0780340515 LA English (英語) CL LCC:TK7836 CL DC20:621.381/52 NO Includes bibliographical references NO "IEEE catalog number 97CH36089" NO "Theme - the quest for semiconductor manufacturing excellence: leading the charge into the 21st Century" NO 書誌ID=1000555917; NCID=BA32832288; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/1000555917 OL 30