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RT Book, Whole SR Print DC OPAC T1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts A1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop A1 Institute of Electrical and Electronics Engineers A1 Semiconductor Equipment and Materials International YR 1993 FD c1993 SP vi, 253 p. K1 Electronic industries -- Congresses K1 Semiconductors -- Design and construction -- Congresses K1 Computer integrated manufacturing systems -- Congresses PB Additional copies of these proceedings may be purchased from SEMI PP Mountain View, CA LA English (英語) CL LCC:TK7836 CL DC20:621.381/52 NO Includes bibliographical references NO "IEEE catalog number 93CH3337-3"--T.p. verso NO 書誌ID=1000487119; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/1000487119 OL 30