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RT Book, Whole SR Print DC OPAC T1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts A1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop A1 Institute of Electrical and Electronics Engineers A1 Semiconductor Equipment and Materials International YR 1992 FD c1992 VO : case. SP v, 232 p. K1 Electronic industries -- Congresses K1 Semiconductors -- Design and construction -- Congresses K1 Computer integrated manufacturing systems -- Congresses PB Additional copies of this proceedings may be purchased from IEEE Service Center PP Piscataway, NJ, USA SN 0780307410 LA English (英語) CL LCC:TK7836 CL DC20:621.381/52 NO Includes bibliographical references NO "IEEE catalog number 92CH3182-3"--T.p. verso NO 書誌ID=1000464470; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/1000464470 OL 30