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RT Book, Whole SR Print DC OPAC T1 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing, meeting the challenges of the global marketplace : ASMC 98 proceedings, September 23-25, 1998, Boston, Massachusetts, USA A1 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop A1 Institute of Electrical and Electronics Engineers A1 Semiconductor Equipment and Materials International YR 1998 FD c1998 VO : soft. VO : case. SP vi, 482 p. K1 Electronic industries -- Congresses K1 Semiconductors -- Design and construction -- Congresses K1 Computer integrated manufacturing systems -- Congresses PB IEEE Service Center PP Piscataway, NJ SN 0780343808 SN 0780343816 LA English (英語) CL LCC:TK7836 CL DC20:621.381/52 NO Includes bibliographical references NO "IEEE catalog number 98CH36168" NO 書誌ID=0219014560; NCID=BA41660569; LK [OPAC]https://www.lib.sophia.ac.jp/opac/opac_link/bibid/0219014560 OL 30